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Proceedings Paper

Physical vapor deposition of multilayered lead-zirconate-titanate films for ultrasonic transducer fabrication
Author(s): Robert J. Kline-Schoder; David B. Kynor; Michael D. Jaeger; Alan A. Winder; Charles S. Desilets
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Paper Abstract

Creare is developing microfabrication techniques to manufacture low-cost, multi-dimensional ultrasonic transducer arrays with single- and multi-layer piezoelectric elements for low impedance and high sensitivity. The manufacturing approach is scaleable for fabrication of transducer arrays in the frequency range of 10 - 50 MHz in dense or sparse array configurations. Our approach employs the following processes: (1) Physical Vapor Deposition (PVD or sputtering) of high-quality, piezoelectric films using reactive sputtering of metallic targets and (2) Novel use of state-of-the-art photolithography and masking to provide the interlayer electrodes, element interconnections, and array element fabrication. To date, Creare has successfully demonstrated that piezoelectrically active thick films of PZT material can be deposited by using a reactive sputtering approach. In addition, these thick, multi-layer PZT films have been formed into high aspect ratio elements using dicing to fabricate a 12 MHz transducer. Array designs based on these films show that expected performance should meet the requirements for high resolution biomedical imaging.

Paper Details

Date Published: 21 June 1999
PDF: 8 pages
Proc. SPIE 3664, Medical Imaging 1999: Ultrasonic Transducer Engineering, (21 June 1999); doi: 10.1117/12.350679
Show Author Affiliations
Robert J. Kline-Schoder, Creare Inc. (United States)
David B. Kynor, Creare Inc. (United States)
Michael D. Jaeger, Creare Inc. (United States)
Alan A. Winder, Acoustic Sciences Associates (United States)
Charles S. Desilets, Ultrex Corp. (United States)

Published in SPIE Proceedings Vol. 3664:
Medical Imaging 1999: Ultrasonic Transducer Engineering
K. Kirk Shung, Editor(s)

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