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Proceedings Paper

Experimental study on framing electron microscopy
Author(s): Shuhong Li; Hanben Niu; Qin Lao Yang; Zhongping Zhang; Zhong Xian F. Song
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Paper Abstract

A transmission framing electron microscope which consists of a lanthanum hexaboride cathode, two focusing lenses, an object lens, an intermediate lens, a projective lens, a scan deflector, a two-aperture-plate, a two compensation deflectors, a fiber plate based phosphor screen, an image intensifier, and a CCD readout system, is constructed based on a DX-4 transmission electron microscope. Two framing micrographs each in the size of (phi) 10 mm, with magnification of 10,000 have been obtained. Under the current condition, the exposure time of 43 ns (FWHM is 21.5 ns) has been achieved. The spatial resolution is evaluated by edge spread function and is proved to be 14.4 nm limited by the CCD readout system. Apart from the technical problems, the physical limitation and the potential of the framing electron microscopy are discussed, indicting that the temporal resolution of 100 ps and the spatial resolution of 10 nm can be achievable. The experimental results and the analysis show the potential of the application of the framing electron microscopy in the related research area.

Paper Details

Date Published: 22 June 1999
PDF: 8 pages
Proc. SPIE 3516, 23rd International Congress on High-Speed Photography and Photonics, (22 June 1999); doi: 10.1117/12.350451
Show Author Affiliations
Shuhong Li, Xi'an Institute of Optics and Precision Mechanics (China)
Hanben Niu, Xi'an Institute of Optics and Precision Mechanics (China)
Qin Lao Yang, Xi'an Institute of Optics and Precision Mechanics (China)
Zhongping Zhang, Xi'an Institute of Optics and Precision Mechanics (China)
Zhong Xian F. Song, Xi'an Institute of Optics and Precision Mechanics (China)


Published in SPIE Proceedings Vol. 3516:
23rd International Congress on High-Speed Photography and Photonics
Valentina P. Degtyareva; Mikhail A. Monastyrski; Mikhail Ya. Schelev; Alexander V. Smirnov, Editor(s)

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