Share Email Print

Proceedings Paper

Current topics of interest in optical metrology
Author(s): Albert F. Slomba
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The process of accommodating extreme measurement geometries, including aspheric cylindrical surfaces, is considered, and an absolute calibration technique for linear surfaces capable of 0.0067 wavelength (42 A) p-p with a precision (1-sigma) of 0.0008 wavelength 5 A is described. The technique was used to measure the absolute axial sag on the inside of a X-ray telescope.

Paper Details

Date Published: 1 October 1990
PDF: 7 pages
Proc. SPIE 1375, ICALEO '89: Optical Sensing and Measurement, (1 October 1990); doi: 10.1117/12.35030
Show Author Affiliations
Albert F. Slomba, United Technologies Optical Systems (United States)

Published in SPIE Proceedings Vol. 1375:
ICALEO '89: Optical Sensing and Measurement
Kevin G. Harding, Editor(s)

© SPIE. Terms of Use
Back to Top