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Proceedings Paper

Contrast enhancement by alkali decomposable additives in chemically amplified negative i-line resists
Author(s): Yasunori Uetani; Hiroshi Moriuma; Yuko Hirai; Yoshiyuki Takata; Airi Yamada
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Paper Abstract

We reported the novel alkali decomposable additives improve dissolution contrast in quinonediazide type positive resists. We have found that NHSE also improves dissolution contrast in chemically amplified negative resists. Good profiles and resolution are obtained by adding NHSE in the chemically amplified negative i-line resist system.

Paper Details

Date Published: 11 June 1999
PDF: 7 pages
Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); doi: 10.1117/12.350232
Show Author Affiliations
Yasunori Uetani, Sumitomo Chemical Co., Ltd. (Japan)
Hiroshi Moriuma, Sumitomo Chemical Co., Ltd. (Japan)
Yuko Hirai, Sumitomo Chemical Co., Ltd. (Japan)
Yoshiyuki Takata, Sumitomo Chemical Co., Ltd. (Japan)
Airi Yamada, Sumitomo Chemical Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 3678:
Advances in Resist Technology and Processing XVI
Will Conley, Editor(s)

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