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Proceedings Paper

NMR analysis of chemically amplified resist films
Author(s): Hiroshi Ito; Mark Sherwood
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Paper Abstract

Carbon-13 nuclear magnetic resonance (NMR) spectroscopy has been employed in the investigation of ESCAP-related deep UV resist films. The films were first processed and then dissolved in a deuterated solvent. Quantitative data were obtained on the concentration of residual casting solvents as a function of the bake temperature and of storage conditions. In addition to accurate determination of the degree of deprotection, side reactions that occur in the resist film such as C- and O-alkylation of the phenol have been quantitatively analyzed while varying the exposure dose, bake temperature, resin structure, and acid generator. Furthermore, photochemical decomposition of several acid generator in the resist film was quantitatively monitored. This paper demonstrates that the C NMR technique can readily provide a wealth of quantitative and indispensable information about constituents and chemistries in resist films.

Paper Details

Date Published: 11 June 1999
PDF: 12 pages
Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); doi: 10.1117/12.350176
Show Author Affiliations
Hiroshi Ito, IBM Almaden Research Ctr. (United States)
Mark Sherwood, IBM Almaden Research Ctr. (United States)

Published in SPIE Proceedings Vol. 3678:
Advances in Resist Technology and Processing XVI
Will Conley, Editor(s)

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