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Proceedings Paper

Model study by FT-IR of the interaction of select cholate dissolution inhibitors with poly(norbornene-alt-maleic anhydride) and its derivatives
Author(s): Gary Dabbagh; Francis M. Houlihan; Ilya Rushkin; Richard S. Hutton; Omkaram Nalamasu; Elsa Reichmanis; Allen H. Gabor; Arturo N. Medina
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Paper Abstract

The fundamental nature of the interaction between the polymer matrix and the cholate based dissolution inhibitors are being studied by Fourier Transform-IR (FTIR) spectroscopy. It was found that the simple cholate derivatives undergo, in a blend with poly(norbornene-alt- maleic anhydride) and in a blend with the terpolymers poly(norbornene-alt-maleic anhydride-co-t-butylacrylate) and poly(norbornene-alt-maleic anhydride-co-acrylic acid), stronger interaction as seen by shifts in the OH region of the spectra than do blends with dimeric or oligomeric cholates.

Paper Details

Date Published: 11 June 1999
PDF: 8 pages
Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); doi: 10.1117/12.350155
Show Author Affiliations
Gary Dabbagh, Lucent Technologies/Bell Labs. (United States)
Francis M. Houlihan, Lucent Technologies/Bell Labs. (United States)
Ilya Rushkin, Lucent Technologies/Bell Labs. (United States)
Richard S. Hutton, Lucent Technologies/Bell Labs. (United States)
Omkaram Nalamasu, Lucent Technologies/Bell Labs. (United States)
Elsa Reichmanis, Lucent Technologies/Bell Labs. (United States)
Allen H. Gabor, Arch Chemicals, Inc. (United States)
Arturo N. Medina, Arch Chemicals, Inc. (United States)


Published in SPIE Proceedings Vol. 3678:
Advances in Resist Technology and Processing XVI
Will Conley, Editor(s)

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