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Proceedings Paper

Optimal method for fabrication of gradient dichroic mirrors without mask
Author(s): Rung-Ywan Tsai; Sen Chrong Shiau; Tzu-Shin Chen
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Paper Abstract

Gradient dichroic mirrors consisting 25 alternating layers of TiO2 and SiO2 were prepared by reactive electron beam deposition at a glass-substrate temperature of 300 degrees C in a home made planetary planar coating system without mask. Samples with the various tilt angles from the rotating axis were hanged on the edge of four specially designed hollow planets. The thickness variation for a single layer SiO2 over a planet of 16 cm diameter at the height of 60 cm was less than 3 percent. This coating system was very suitable for the coating of gradient dichroic mirrors with large area showing the consistent color performance with various incident angles across the mirror surface.

Paper Details

Date Published: 20 May 1999
PDF: 8 pages
Proc. SPIE 3634, Projection Displays V, (20 May 1999); doi: 10.1117/12.349363
Show Author Affiliations
Rung-Ywan Tsai, Industrial Technology Research Institute (Taiwan)
Sen Chrong Shiau, Industrial Technology Research Institute (Taiwan)
Tzu-Shin Chen, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 3634:
Projection Displays V
Ming Hsien Wu, Editor(s)

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