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Proceedings Paper

Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs
Author(s): Victor Pavlovich Korolkov; Anatoly I. Malyshev; Vladislav G. Nikitin; Alexander G. Poleshchuk; Andrey A. Kharissov; Vadim V. Cherkashin; Chuck Wu
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Paper Abstract

The perspective opportunity to fabricate gray-scale masks was given LDW-glasses (LDW--Laser Direct Writing) from Canyon Materials, Inc. LDW-glass blanks contain a large number density of coloring specks of silver in a surface glass layer. A focused laser beam is used to heat erase these coloring specks. Experiments on the influence of laser radiation on LDW-glasses was carried out using a circular laser writing system. The transmittance value from the blank of 0.1 - 5% up to 70 - 80% depending on laser beam power is obtained with the current write scheme. Results of research of LDW-glasses behavior in a wide range of laser beam scanning speeds are described. Laser pattern generation in LDW-glass including the spatial resolution is discussed. The technology of fabrication of continuous-phase diffractive elements was tested by making exemplary Fresnel lenses. Total 80% efficiency for quartz Fresnel lenses with minimal zone width of 8 micrometers was readily achieved in the preliminary experiments.

Paper Details

Date Published: 1 June 1999
PDF: 10 pages
Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); doi: 10.1117/12.349316
Show Author Affiliations
Victor Pavlovich Korolkov, Institute of Automation and Electrometry (Russia)
Anatoly I. Malyshev, Institute of Automation and Electrometry (Russia)
Vladislav G. Nikitin, Institute of Automation and Electrometry (Russia)
Alexander G. Poleshchuk, Institute of Automation and Electrometry (Russia)
Andrey A. Kharissov, Institute of Automation and Electrometry (Russia)
Vadim V. Cherkashin, Institute of Automation and Electrometry (Russia)
Chuck Wu, Canyon Materials, Inc. (United States)


Published in SPIE Proceedings Vol. 3633:
Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI
Ivan Cindrich; Sing H. Lee; Richard L. Sutherland, Editor(s)

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