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Proceedings Paper

Ellipsometry of diffracted light
Author(s): Josef Humlicek; Karel Vojtechovsky; Irena Drimalova; Eva Bochnickova
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Paper Abstract

We present studies of very rich polarization phenomena observed in the light diffracted from regular geometrical patterns. The ratio of the field amplitudes for the p-and 8-polarized light is accessible in standard ellipsometric measurements. Forward calculations based on a scalar diffraction integral predict ellipticity and phase shifts in the specular and higher-order beams. Both one- and two-dimensional patterns created in general planar filmed structures are dealt with. We identify effects related to propagation of light in the film system, i.e., to the film thicknesses and their optical properties. Characteristic features due to the in-plane geometrical arrangement are also identified, especially, the effects of the transient regions between the neighboring plane segments.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34909
Show Author Affiliations
Josef Humlicek, Masaryk Univ. (Czech Republic)
Karel Vojtechovsky, Tesla Roznov (Czech Republic)
Irena Drimalova, Masaryk Univ. (Czech Republic)
Eva Bochnickova, Masaryk Univ. (Czech Republic)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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