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Proceedings Paper

Interferometric measurement of the optical penetration depth into a processed surface
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Paper Abstract

The penetration depth of light into a processed surface is interferometrically ieasured by optically contacting it on a glass plate with a resolution of 3 urn. This principle is based on the ieasurement of the difference between the phase changes of light in reflections on the object and the glass plate. Also the depth is siiiultanecusly measured by an optical systeii with a phase-locked laser interferometer and an optical displacement sensor. 1 .

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34889
Show Author Affiliations
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)
Yucong Zhu, National Research Lab. of Metrology (Japan)
Tokuyuki Honda, National Research Lab. of Metrology (Japan)


Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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