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Proceedings Paper

Interferometric measurement of the optical penetration depth into a processed surface
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Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34889
Show Author Affiliations
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)
Yucong Zhu, National Research Lab. of Metrology (Japan)
Tokuyuki Honda, National Research Lab. of Metrology (Japan)


Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems

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