Share Email Print
cover

Proceedings Paper

Monitoring micro floor vibrations with distributed fiber optic sensors
Author(s): Dryver R. Huston; William B. Spillman; Wolfgang Sauter; Noel V. Pelczarski
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In certain applications, such as microelectronic manufacturing, monitoring and controlling small floor vibrations can be essential. This paper describes how an array of distributed fiber optic sensor can be used to monitor micro floor vibrations as part of an adaptive control strategy. The performance target is to limit vibrations in 'the 10 Hz frequency range to less than 10 microinches peak to peak. The distributed fiber optic sensor are of an interferometric design that uses a single mode to multi mode to single mode configuration. The fibers are laid in an orthogonal grid so as to localize vibration hot spots. Data comparing the performance of the vibration sensing array with that of conventional point piezoelectric accelerometers, as well as sensing and control strategies will be presented.

Paper Details

Date Published: 18 May 1999
PDF: 8 pages
Proc. SPIE 3671, Smart Structures and Materials 1999: Smart Systems for Bridges, Structures, and Highways, (18 May 1999); doi: 10.1117/12.348661
Show Author Affiliations
Dryver R. Huston, Univ. of Vermont (United States)
William B. Spillman, Univ. of Vermont (United States)
Wolfgang Sauter, Univ. of Vermont (United States)
Noel V. Pelczarski, Univ. of Vermont (United States)


Published in SPIE Proceedings Vol. 3671:
Smart Structures and Materials 1999: Smart Systems for Bridges, Structures, and Highways
S.-C. Liu, Editor(s)

© SPIE. Terms of Use
Back to Top