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Proceedings Paper

Optical microtopographer for rough surfaces
Author(s): Manuel Filipe M. Costa; Jose B. Almeida
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Paper Abstract

We describe a noncontact optical microtopographer designed to map the relief of rough surfaces with resolutions in the submicron order. The principle of operation is based on the horizontal shift of a bright light spot on an horizontal surface illuminated by an oblique light beam when that surface suffers a vertical displacement. In this system the optical mecanical and electrooptical hardware contraints are more important than the software ones in oposition to what happens in other systems namely those using fringe projection.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34864
Show Author Affiliations
Manuel Filipe M. Costa, Univ. do Minho (Portugal)
Jose B. Almeida, Univ. do Minho (Portugal)


Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems

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