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Proceedings Paper

Characterization of supersmooth surfaces with roughness below 0.1 nm
Author(s): Andrew J. Schmitt
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Paper Abstract

Supersmooth surfaces with a roughness of 0. 05 nm have been developed and characterized by Nomarski microscopy and other optical and mechanical profiling systems. Photomicro graphs of these surfaces are being discussed. 1.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34858
Show Author Affiliations
Andrew J. Schmitt, U.S. Navy (United States)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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