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Proceedings Paper

System for quanititative microscopy
Author(s): Lionel R. Baker
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Paper Abstract

Attempts to extend the range of operation of the microscope beyond conventional resolution limits usually require precise control of light intensity and carefully stabilised laboratory environnnts. The system to be described avoids these problems by the use of comparator microscopy combined with null-photometry. Applications of this quantitative 3D microscope are expected to be in the quality control of microcircuit patterns and the surfaces of precision engineering and optical components and in biology. This development was undertaken to see if optical microscopy could be extended down to the nanotechnology regime and at the same time be suitable for industrial applications preferably on-machine . The first application of this system has been for the measurement of surface flaws such as digs and scratches which can be of nanometre dimensions. Recent results given here denvnstrate the potential of the system for quantifying line widths and measuring surface microtopography.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34813
Show Author Affiliations
Lionel R. Baker, Sira Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems

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