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Proceedings Paper

Side-looking confocal microscope
Author(s): Takahiro Ode; Satoshi Komiya; Y. Yamauchi; Daikichi Awamura
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Paper Abstract

We developed the Side Looking Confocal Microscope(SLCM) of which illmination axis and sensing axis are tilted from a perpendicular plane of an object. The standard confocal microscope has also an illmination source and a sensor which are situated on the same optical axis from an object. Its enterance angle is zero degrees. So in that case we can''t see 3-dimensional images -which are only bright field image- by means of standard confocal microscope method. SLCM which we developed is able to see 3-dimensional easily like a SEM image because of its angular illumination method.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34806
Show Author Affiliations
Takahiro Ode, Lasertec Co. (Japan)
Satoshi Komiya, Lasertec Co. (Japan)
Y. Yamauchi, Lasertec Co. (Japan)
Daikichi Awamura, Lasertec Co. (Japan)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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