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Proceedings Paper

Performance of titanium and amorphous germanium microbolometer infrared detectors
Author(s): M. V. S. Ramakrishna; G. Karunasiri; U. Sridhar; G. Chen
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Paper Abstract

There is a considerable interest in recent years on microbolometer infrared detectors, due to the possibility of operating them at room temperature and the compatibility with CMOS fabrication process. In this work, we have fabricated bolometers with Ti and a:Ge as the sensing elements using a CMOS compatible process. Noise measurements indicate that detectivity D* of over 1.5 X 109 cmHz-1/2W-1 and 4 X 109 cmHz-1/2W-1 at 30 Hz could be realized for a:Ge and Ti bolometers, respectively. With further improvements in design and processing, it is estimated that bolometer focal plane arrays (FPAs) with noise equivalent temperature difference (NETD) of less than 50 mK are realizable using the above materials.

Paper Details

Date Published: 28 April 1999
PDF: 6 pages
Proc. SPIE 3666, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98, (28 April 1999); doi: 10.1117/12.347954
Show Author Affiliations
M. V. S. Ramakrishna, National Univ. of Singapore (Singapore)
G. Karunasiri, National Univ. of Singapore (Singapore)
U. Sridhar, Institute of Microelectronics (Singapore)
G. Chen, Institute of Microelectronics (Singapore)


Published in SPIE Proceedings Vol. 3666:
International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98
Anurag Sharma; Banshi Dhar Gupta; Ajoy K. Ghatak, Editor(s)

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