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Proceedings Paper

Measurements of the effective optical constants and the flying height of read-write sliders by heterodyne inteferometry
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Paper Abstract

A new method for measuring the effective optical constants and the flying-heights with only an optical set-up by using the heterodyne interferometry is proposed. At first, a set of special equations for describing the relations among the phase differences of s-polarization with respect to p-polarization, the effective optical constants, and the flying-heights, are derived from the Fresnel's equations and the effects of multi- beam interferences. And the effective optical constants can be obtained from the conditions for the extreme points, which can be accurately determined with a heterodyne interferometer. Substituting the optical constants into the special equations which we derived previously, the flying-heights can be estimated.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347839
Show Author Affiliations
JuYi Lee, National Chiao Tung Univ. (Taiwan)
Der-Chin Su, National Chiao Tung Univ. (Taiwan)
Cheng-Chih Hsu, Chung Yuan Christian Univ. (Taiwan)

Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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