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Proceedings Paper

Development of state-of-the-art devices on the subnanometer grinding machine tool for optical glasses
Author(s): Hiroshi Eda; Lotfi Chouanine; Jun Shimizu; Libo Zhou
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Paper Abstract

This paper gives an overview of development of the kernel technologies and parameter generalization at ductile mode conditions for grinding of optical glasses. An ultra precision machine tool capable of multiply functioning grinding, cutting, lapping or polishing has been newly developed for the ductile-mode grinding of hard-brittle materials. The key components built in the system are inclusive of the force transducer for sub-mN measurement and the PZT actuator for precise positioning. Through the grinding tests and scratching tests, the machining parameters governing the brittle-to- ductile transition have been established for a series of glasses. It also reveals a fact that the critical depth in grinding is thereabouts six times bigger than the critical depth in indentation and seven times than in scratching.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347833
Show Author Affiliations
Hiroshi Eda, Ibaraki Univ. (Japan)
Lotfi Chouanine, NGK Insulators, Ltd. (Japan)
Jun Shimizu, Ibaraki Univ. (Japan)
Libo Zhou, Ibaraki Univ. (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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