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Proceedings Paper

Enhancement of AFM images by compensating the hysteresis and creep effect within PZT
Author(s): Hewon Jung; Jongyoup Shim; Dae gab Gweon
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Paper Abstract

In equi-force mode among the AFM scanning modes, the scanning data of a sample is acquired by Z-axis PZT input voltages. But, PZT actuator has a hysteresis and creep between the input voltages and the output displacements. These nonlinearities make a distortion in scanning images. We propose that the creep effect of stack-type PZT shows hysteresis property and classical preisach model can be applied to AFM scanning data according to this property. Finally we will prove that AFM image is improved by the classical preisach model application.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347827
Show Author Affiliations
Hewon Jung, Korea Advanced Institute of Science and Technology (South Korea)
Jongyoup Shim, Korea Advanced Institute of Science and Technology (South Korea)
Dae gab Gweon, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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