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Proceedings Paper

Shear force characteristics and piezoelectric tip-sample distance control for NSOM
Author(s): Jun Hee Lee; Hyongryol Oh; Dae gab Gweon
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Paper Abstract

The shear force characteristics of NSOM (Near field scanning optical microscopy) probe is examined. The NSOM probe is modeled as a 2'nd order mass-spring-damper system driven by a harmonic force. The primary cause of the decrease in vibration amplitude is due to the damping force -- shear force -- between the surface and the probe. Using the model, damping constant and resonance frequency of the probe is calculated as a function of probe-sample distance. Detecting the amplitude and phase shift of the NSOM probe attached to the high Q- factor piezoelectric tuning fork, we can control the position of the NSOM probe about 0 to 50 nm above the sample. The feedback signal to regulate the probe-sample distance can be used independently for surface topography imaging. Three- dimensional view of the shear force image of a testing sample with the period of 1 micrometer will be shown.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347823
Show Author Affiliations
Jun Hee Lee, Korea Advanced Institute of Science and Technology (South Korea)
Hyongryol Oh, Korea Advanced Institute of Science and Technology (South Korea)
Dae gab Gweon, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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