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Proceedings Paper

Fabrication of composite sol-gel optical channel waveguides by laser writing lithography
Author(s): Wenxiu Que; Yan Zhou; Yee Loy Lam; Yuen Chuen Chan; Yuwen Chen; Seng Lee Ng; ChinYi Liaw; Chan Hin Kam
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Paper Abstract

We report the preparation of high optical quality sol-gel waveguide films made from high titanium content organically modified silane (ORMOSIL) and the fabrication of optical channel waveguides in the deposited sol-gel films. The waveguide films were deposited on a solid substrate (such as silicon) by spin-coating and low temperature baking, and the channel waveguides were fabricated using laser writing and reactive ion etching (RIE). The properties of the sol-gel waveguide films were characterized using atomic force microscopy (AFM), ellipsometry, and UV-visible spectroscopy (UV-VIS). AFM and ellipsometry results showed that a dense and porous-free waveguide film could be obtained at the heat treatment temperature of 100 degrees celsius. The influence of the RIE parameters including O2 content, rf power, and pressure on etching rate of the sol-gel waveguide films have been investigated. After a number of exploratory experiments, suitable etching parameters for the case of photoresist mask layer have been obtained.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347820
Show Author Affiliations
Wenxiu Que, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Yuwen Chen, Nanyang Technological Univ. (Singapore)
Seng Lee Ng, Nanyang Technological Univ. (Singapore)
ChinYi Liaw, Nanyang Technological Univ. (Singapore)
Chan Hin Kam, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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