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Proceedings Paper

Practical measurement system for determination of refractive index and thickness using low-coherence interferometry
Author(s): Hideki Maruyama; Shogo Inoue; Masato Ohmi; Keita Ihara; Shoji Nakagawa; Masamitsu Haruna
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Paper Abstract

Very recently, we developed a computer-controlled low- coherence interferometer system with precise translation stages for simultaneous measurement of refractive index and thickness. Both phase and group indices can be determined automatically in a wide thickness range of 20 micrometer to a few mm. This paper presents the system configuration and the measurement principle accompanied with typical examples of automatic measurement.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347811
Show Author Affiliations
Hideki Maruyama, Kyushu Matsushita Electric Co., Ltd. (Japan)
Shogo Inoue, Osaka Univ. (Japan)
Masato Ohmi, Osaka Univ. (Japan)
Keita Ihara, Kyushu Matsushita Electric Co., Ltd. (Japan)
Shoji Nakagawa, Kyushu Matsushita Electric Co., Ltd. (Japan)
Masamitsu Haruna, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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