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Proceedings Paper

High-sensitivity surface measurements by a heterodyne white-light interferometer
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Paper Abstract

A novel low-coherence interferometer has been developed, based on the heterodyne technique for highly accurate and sensitive positioning of a three-dimensional (3-D) object, which uses two acousto-optic modulators (AOM's) and two spherical reflecting mirrors in a Michelson interferometer. By using this technique in a tandem interferometer, the profiles of diffusing and mirror-likes surfaces of the 3-D objects are measured with a high accuracy of 50 nm from the heterodyne signals of 200 kHz.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347802
Show Author Affiliations
Akiko Hirai, National Research Lab. of Metrology (Japan)
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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