Share Email Print
cover

Proceedings Paper

White light phase-shifting interferometry with self-compensation of PZT scanning errors
Author(s): Seung-Woo Kim; MinGu Kang; SangYoon Lee
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

One of main error sources in scanning white light interferometry is the inaccuracy of scanning mechanisms for which PZT piezoelectric ceramics actuators are widely used. In this paper, we propose a new calibration method being capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. Experimental results prove that the method provides an effective means of in-situ self-calibration enhancing the measurement uncertainty by one order of magnitude.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347782
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
MinGu Kang, Korea Advanced Institute of Science and Technology (South Korea)
SangYoon Lee, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

© SPIE. Terms of Use
Back to Top