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Proceedings Paper

Shadow moire profilometry using a phase-shifting method
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Paper Abstract

In order to measure 3-D surface of objects by using phase- shifting method, based on shadow moire topography, two stages are planned. The stages are moving the grating vertically, which produces a change in moire pattern; rotating the grating, which results in the constant phase-shift regardless of the moire fringe order. The paper emphasis is on describing the novel method, and justifying it by error simulation test. The experimental results show that this technique is available for some industrial fields.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347777
Show Author Affiliations
Lianhua Jin, Tokyo Univ. of Agriculture and Technology (Japan)
Yutaka Kodera, Tokyo Univ. of Agriculture and Technology (Japan)
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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