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Proceedings Paper

Common-path multichannel heterodyne laser interferometer for subnanometer surface metrology
Author(s): Feng Zhao; Jennifer E. Logan; Stuart B. Shaklan; Michael Shao
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Paper Abstract

A multi-channel heterodyne laser interferometer is proposed for measurement of optical surface deformations at the sub- nanometer level. This interferometer employs a common-path configuration and heterodyne detection, by which fringe errors due to laser frequency fluctuations and optical path variations due to vibration can be reduced. By measuring the heterodyne signal phase among sub-apertures (pixels) with a 2- D detector array, the surface height can be reconstructed and surface deformation can be measured by comparing consecutive measurements. Detection of sub-nanometer level surface deformation is achieved using high precision digital phase meters and athermalized opto-mechanical systems. This paper describes the interferometer design criteria and experiment methodologies.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347766
Show Author Affiliations
Feng Zhao, Jet Propulsion Lab. (United States)
Jennifer E. Logan, Jet Propulsion Lab. (United States)
Stuart B. Shaklan, Jet Propulsion Lab. (United States)
Michael Shao, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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