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Proceedings Paper

Novel film sensor based on p-polarized reflectance
Author(s): Zhengtian Gu; Peihui Liang; Xiaolin Liu; Weiqing Zhang
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Paper Abstract

A new scheme of sensor is presented in this paper. The optimization of parameters of the sensor is carried out for designing optical sensor with high sensitivity. By data simulation, the resolutions of nf, kf and df of the film sensor are predicted to be less than 10-7, 10-5, 10-3 nm, respectively. The optical parameters of sol-gel SnO2 film were measured under different dip rates and annealing temperatures, and the sensitivity to the gas C3H8 was investigated. The results indicate that the detection limit is available to 10-1 ppm on the condition of optimum optical parameter and incident angle.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347765
Show Author Affiliations
Zhengtian Gu, Shanghai Institute of Optics and Fine Mechanics (China)
Peihui Liang, Shanghai Institute of Optics and Fine Mechanics (China)
Xiaolin Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Weiqing Zhang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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