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Proceedings Paper

Surface shape measurement using a wavelength-scanning Fizeau interferometer
Author(s): Akihiro Yamamoto; Ichirou Yamaguchi; Masaru Yano
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Paper Abstract

We have developed a wavelength scanning Fizeau interferometer for surface profilometry. This interferometer is free from ambiguity of the sign of the resultant profile. It is more compact and robust for disturbance such as vibration than the Michelson interferometer used previously. Experimental results from a step and a dip on mirror surfaces are shown. We could measure a step 1.1 mm high. We also could map a part of a coin but with a noisy result. Origins of the noises are also discussed.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347758
Show Author Affiliations
Akihiro Yamamoto, Institute of Physical and Chemical Research (RIKEN) (Japan)
Ichirou Yamaguchi, Institute of Physical and Chemical Research (RIKEN) (Japan)
Masaru Yano, Saitama Univ. (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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