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Proceedings Paper

Accurate measurement of the flatness of etalons
Author(s): Shin-ichi Itoh; Kentaro Katoh; Tsuyoshi Oikawa; Jun Chen
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Paper Abstract

The method of measurement of two-dimensional flatness of etalons are proposed. Fundamental idea is to measure diameters of interference rings produced on CCD camera. The reproducibility is about (lambda) /1800.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347756
Show Author Affiliations
Shin-ichi Itoh, Tokyo Kogei Univ. (Japan)
Kentaro Katoh, Tokyo Kogei Univ. (Japan)
Tsuyoshi Oikawa, Tokyo Kogei Univ. (Japan)
Jun Chen, Tokyo Kogei Univ. (Japan)

Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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