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Proceedings Paper

Absolute measurement of a spherical surface using a point diffraction interferometer
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Paper Abstract

Absolute measurement of spherical surface by use of point diffraction interferometer (PDI) has been studied both theoretically and experimentally. By the estimation of optical error, 10-3 (lambda) rms can be expected as absolute accuracy. Experimental results with high accuracy have been obtained.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347755
Show Author Affiliations
Katsura Otaki, Nikon Corp. (Japan)
Florian Bonneau, CEA-DIF (Japan)
Yutaka Ichihara, Nikon Corp. (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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