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Proceedings Paper

Height gauging by wavelength-scanning interferometry with phase detection
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Paper Abstract

We have realized an accurate step height measurement by using the wavelength scanning interferometry combined with phase- shifting technique. It is based on detection of phase variation slope along the wavenumber axis at each pixel of a CCD camera taking a number of interferograms at different wavelengths and phases. By using a tunable laser diode with wavelength-scanning range of approximately 8 nm, a height deviation of sub-micrometer could be measured by using a PZT phase-shifter. This technique was applied to a height gauging of the gold bump array.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347753
Show Author Affiliations
Jun-ichi Kato, RIKEN--The Institute of Physical and Chemical Research (Japan)
Ichirou Yamaguchi, RIKEN--The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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