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Proceedings Paper

Light sectioning for step profile measurement using a spatial filter in a sensing unit
Author(s): Tetsuya Matsumoto; Yoichi Kitagawa; Kazumo Nakazato; Masaaki Adachi
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Paper Abstract

We propose a new profile measurement system with light sectioning, which is available to detect step profiles on objects. We can intercept obstructive signals due to the day light reflected from the objects, by using a modulated laser beam and lock-in demodulation. The performance of this system was confirmed by experiments, in which step profiles of objects at a distance of 500 mm could be measured.

Paper Details

Date Published: 7 May 1999
PDF: 4 pages
Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347752
Show Author Affiliations
Tetsuya Matsumoto, Hyogo Prefectural Institute of Industrial Research (Japan)
Yoichi Kitagawa, Hyogo Prefectural Institute of Industrial Research (Japan)
Kazumo Nakazato, Hyogo Prefectural Institute of Industrial Research (Japan)
Masaaki Adachi, Kanazawa Univ. (Japan)


Published in SPIE Proceedings Vol. 3740:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Ichirou Yamaguchi, Editor(s)

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