Share Email Print
cover

Proceedings Paper

Creation of superhard C3N4 films by laser ablation
Author(s): Miroslav Jelinek; Jan Lancok; Wilhelm Kulisch; Rumen I. Tomov
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Contribution deal with laser deposition of superhard carbon nitride (beta) -C3N4 thin films. Survey of results reached by various groups is done. Problems of stoichiometry definition, stoichiometry measurement and deposition parameters having influence on the increase of nitrogen content in layers is discussed.

Paper Details

Date Published: 7 May 1999
PDF: 8 pages
Proc. SPIE 3571, Tenth International School on Quantum Electronics: Laser Physics and Applications, (7 May 1999); doi: 10.1117/12.347663
Show Author Affiliations
Miroslav Jelinek, Institute of Physics (Czech Republic)
Jan Lancok, Institute of Physics (Czech Republic)
Wilhelm Kulisch, Univ. of Kassel (Germany)
Rumen I. Tomov, Institute of Electronics (Bulgaria)


Published in SPIE Proceedings Vol. 3571:
Tenth International School on Quantum Electronics: Laser Physics and Applications

© SPIE. Terms of Use
Back to Top