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Proceedings Paper

Diagnostics and modeling of a pulsed microwave-excited discharge in oxygen
Author(s): Margarita G. Baeva; X. Luo; Juergen Uhlenbusch
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Paper Abstract

Investigations on a pulsed O2 plasma under low pressure (1 - 10) mbar have been carried out. Microwave pulses (2.45 GHz) with a duration of (50 - 200) microsecond(s) and a repetition rate of (10 - 500) Hz are typical for the experiments. The electron density has been determined by means of an HCN laser interferometer. Detection of negative ions O- has been performed using a photodetachment technique with a Nd:YAG laser. A kinetic model predicting the temporal behavior of the densities of oxygen atoms and molecules, metastable singlets O2(a1(Delta) , b1(Sigma) ), negative ions O-, positive ions O+2, ozone, and the electron density has been developed. The experimental and theoretical data are fond to agree well.

Paper Details

Date Published: 7 May 1999
PDF: 5 pages
Proc. SPIE 3571, Tenth International School on Quantum Electronics: Laser Physics and Applications, (7 May 1999); doi: 10.1117/12.347624
Show Author Affiliations
Margarita G. Baeva, Technical Univ. of Varna (Bulgaria) and Heinrich-Heine-Univ. (Bulgaria)
X. Luo, Heinrich-Heine-Univ. Duesseldorf (Germany)
Juergen Uhlenbusch, Heinrich-Heine-Univ. Duesseldorf (Germany)


Published in SPIE Proceedings Vol. 3571:
Tenth International School on Quantum Electronics: Laser Physics and Applications
Peter A. Atanasov; Dimitar V. Stoyanov, Editor(s)

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