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Proceedings Paper

High-resolution real-time full-field interference microscopy
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Paper Abstract

We have built an interference microscope that produces in real-time images of cross-section slices located at adjustable depths inside 3-D objects. The microscope is based on a Michelson-type polarization interferometer. A light emitting diode (LED), used as an optical source at (lambda) equals 840 nm with short coherence length, provides optical sectioning ability with better than 10 micrometer resolution in the depth dimension. By using high numerical aperture objective lenses (NA equals 0.95), the depth resolution can be improved to better than 1 micrometer, in good agreement with theory. Images can be produced at the rate of 50 per second using a multiplexed lock-in detection and MMX assembler-optimized calculation routines. Cross-section images inside an onion and at different depths in a multilayer silicon integrated circuit are presented.

Paper Details

Date Published: 6 May 1999
PDF: 8 pages
Proc. SPIE 3605, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing VI, (6 May 1999); doi: 10.1117/12.347563
Show Author Affiliations
Arnaud Dubois, Ecole Superieure de Physique et Chimie Industrielles (France)
Martial Lebec, Univ. Lyon I--Claude Bernard (France)
Emmanuel Beaurepaire, Ecole Superieure de Physique et Chimie Industrielles (France)
Sandrine Leveque, Ecole Superieure de Physique et Chimie Industrielles (France)
Albert Claude Boccara, Ecole Superieure de Physique et Chimie Industrielles (France)


Published in SPIE Proceedings Vol. 3605:
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing VI
Dario Cabib; Carol J. Cogswell; Jose-Angel Conchello; Jeremy M. Lerner; Tony Wilson, Editor(s)

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