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Proceedings Paper

Experimental study and computer simulation of AlN and BN sputtering
Author(s): S. S. Elovikov; E. Yu. Zykova; A. A. Promokhov; V. E. Yurasova
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Paper Abstract

The radiation stability of AlN polycrystals with wurzite structure and BN polycrystals with hexagonal and rhombohedral structure irradiated with Ar+ and Kr+ ions was studied experimentally and by computer simulation for normal and oblique incidence. Absolute values of the sputtering yield from AlN were measured for the first time and used to choose the binding energy in the simulation model. Radiation strength of BN to ion irradiation is much higher than that of AlN. The effect of low-energy electron irradiation on surface structure was studied. It was found that, in contrast with BN, the surface of AlN is not modified by electrons.

Paper Details

Date Published: 5 May 1999
PDF: 6 pages
Proc. SPIE 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 May 1999); doi: 10.1117/12.347434
Show Author Affiliations
S. S. Elovikov, Moscow State Univ. (Russia)
E. Yu. Zykova, Moscow State Univ. (Russia)
A. A. Promokhov, Moscow State Univ. (Russia)
V. E. Yurasova, Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 3687:
International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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