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Proceedings Paper

Nonconventional transition layer formation during PLD of nanometer-period multilayers
Author(s): Andre A. Gorbunov; K. Brand; H. Geisler; J. Noetzel; B. Wehner; A. Tselev; Vladimir S. Kharlamov; Hermann Mai; J. Thomas; Hannes Lichte; W. Pompe; J. Trushin; E. Wieser; Hartmut Worch
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Paper Abstract

During pulsed laser deposition ions with kinetic energies of the order of 100 eV can already cause intermixing of nm- periodical multilayers followed by non-conventional phase formation in the transition layers. In the present paper experimental studies of concentration profiles in Ni/C, Fe/Al, Co/Cu multilayers prepared by pulsed laser deposition are compared with ballistic simulations of the deposition process. It was found that generally the ballistic simulation provides the right order of magnitude of the real transition layer width. Unusual phase formation in transition layers including supersaturation, amorphization, pseudomorphism, demixing, and interface coarsening are considered to be a result of solid- state processes directed towards minimization of the free energy of the system.

Paper Details

Date Published: 5 May 1999
PDF: 10 pages
Proc. SPIE 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 May 1999); doi: 10.1117/12.347430
Show Author Affiliations
Andre A. Gorbunov, Technische Univ. Dresden (Germany)
K. Brand, Technische Univ. Dresden (Germany)
H. Geisler, Technische Univ. Dresden (Germany)
J. Noetzel, Forschungszentrum Rossendorf (Germany)
B. Wehner, Technische Univ. Dresden (Germany)
A. Tselev, Technische Univ. Dresden (Germany)
Vladimir S. Kharlamov, A.F. Ioffe Physical-Technical Institute (Russia)
Hermann Mai, Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany)
J. Thomas, Institut fuer Festkoerper und Werkstofforschung (Germany)
Hannes Lichte, Technische Univ. Dresden (Germany)
W. Pompe, Technische Univ. Dresden (Germany)
J. Trushin, A.F. Ioffe Physical-Technical Institute (Russia)
E. Wieser, Forschungszentrum Rossendorf (Germany)
Hartmut Worch, Technische Univ. Dresden (Germany)

Published in SPIE Proceedings Vol. 3687:
International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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