Share Email Print
cover

Proceedings Paper

Molecular dynamics calculations of the early stages of thin film formation
Author(s): Gerhard Betz; Wolfgang Husinsky
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this contribution we will discuss recent results obtained from Molecular Dynamics (MD) calculations of early stages of thin film deposition for metal atoms and clusters on metal substrates. As a first example we will discuss the deposition of Cu atoms on a Pb single crystal surface. In this case our MD calculations could verify an experimentally observed new growth mode in deposition, which was named subsurface island growth. As a second example we will discuss the possibilities and processes occurring during thin film deposition, if instead of atoms clusters (consisting of up to a few hundred atoms) are used. As an example we present the deposition of Al cluster of different size (ranging from 60 atoms up to 1000 atoms per cluster) on a Cu surface.

Paper Details

Date Published: 5 May 1999
PDF: 7 pages
Proc. SPIE 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 May 1999); doi: 10.1117/12.347412
Show Author Affiliations
Gerhard Betz, Technische Univ. Wien (Austria)
Wolfgang Husinsky, Technische Univ. Wien (Austria)


Published in SPIE Proceedings Vol. 3687:
International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

© SPIE. Terms of Use
Back to Top