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Proceedings Paper

Cryogenic microcalorimeters and tunnel junctions for high-resolution energy dispersive x-ray spectrometry
Author(s): Jens Hoehne; Michael Altmann; Godehard Angloher; Matthias Buehler; Franz v. Feilitzsch; Torsten Frank; Paul Hettl; Theo Hertrich; Josef Jochum; Tobias Nuessle; Stefan Pfnuer; Johann Schnagl; Stefanie Waenninger
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Paper Abstract

We have been developing cryogenic detectors for astro- particle physics applications including search for Dark Matter, neutrino physics and x-ray astronomy. Most recently we started the development of high resolution x-ray detectors based on superconducting tunnel junctions and superconducting phase transition thermometers/transition edge sensors for microanalysis applications. Both types of sensors are being investigated as well as the cryogenic setup for applications on a scanning electron microscope.

Paper Details

Date Published: 27 April 1999
PDF: 7 pages
Proc. SPIE 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, (27 April 1999); doi: 10.1117/12.346911
Show Author Affiliations
Jens Hoehne, Cryogenic Spectrometers GmbH (Germany)
Michael Altmann, Technische Univ. Muenchen (Germany)
Godehard Angloher, Technische Univ. Muenchen (Germany)
Matthias Buehler, Cryogenic Spectrometers GmbH (Germany)
Franz v. Feilitzsch, Technische Univ. Muenchen (Germany)
Torsten Frank, Cryogenic Spectrometers GmbH (Germany)
Paul Hettl, Technische Univ. Muenchen (Germany)
Theo Hertrich, Cryogenic Spectrometers GmbH (Germany)
Josef Jochum, Technische Univ. Muenchen (Germany)
Tobias Nuessle, Technische Univ. Muenchen (Germany)
Stefan Pfnuer, Technische Univ. Muenchen (Germany)
Johann Schnagl, Technische Univ. Muenchen (Germany)
Stefanie Waenninger, Technische Univ. Muenchen (Germany)


Published in SPIE Proceedings Vol. 3743:
In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing
Kostas Amberiadis; Gudrun Kissinger; Katsuya Okumura; Seshu Pabbisetty; Larg H. Weiland, Editor(s)

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