Share Email Print
cover

Proceedings Paper

Advanced holography for microelectronic manufacturing: novel methods well fitted for real time in the line checks performed in the industrial environment
Author(s): Valery Petrov
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Current manufacturing processes require rapid, inexpensive and reliable techniques for optical inspections of machinery, products and components. Holography and holographic interferometry in spite of their attractive features are rather rarely used for industrial inspections due to relative complexity, costs, lengthy multi-stage procedures, need of dark roms and vibration insulation. Personnel skilled in optics ins also required. Thus holography is usually regarded as poorly compatible with practical industrial environment.

Paper Details

Date Published: 27 April 1999
PDF: 12 pages
Proc. SPIE 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, (27 April 1999); doi: 10.1117/12.346906
Show Author Affiliations
Valery Petrov, Fachhochschule Ulm (Germany)


Published in SPIE Proceedings Vol. 3743:
In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing
Kostas Amberiadis; Gudrun Kissinger; Katsuya Okumura; Seshu Pabbisetty; Larg H. Weiland, Editor(s)

© SPIE. Terms of Use
Back to Top