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Proceedings Paper

Application of magnetron-sputtering-obtained Ce-Zr-O2-x-oxide thin layers to gas detection
Author(s): Jan Ziaja; Wlodzimierz Mista
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Paper Abstract

Thin layers of Ce-Zr-O2-x with varied chemical and phase composition were deposited by magnetron sputtering with pulse power supply system. The phase transition in the function of temperature and additionally during hydrogen treatment were studied. The variation of resistivity of such layers was found during changing of the gas atmosphere. By comparison, the properties of thin films prepared by sol-gel method were also studied.

Paper Details

Date Published: 30 April 1999
PDF: 4 pages
Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999); doi: 10.1117/12.346842
Show Author Affiliations
Jan Ziaja, Technical Univ. of Wroclaw (Poland)
Wlodzimierz Mista, Institute of Low Temperature and Structural Research (Poland)


Published in SPIE Proceedings Vol. 3730:
Optoelectronic and Electronic Sensors III
Antoni Nowakowski; Bogdan Chachulski, Editor(s)

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