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Proceedings Paper

Theoretical studies on energy loss processes in a discharge-pumped ArF excimer laser
Author(s): Hideo Furuhashi; Jun Yamada; Yoshiyuki Uchida
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Paper Abstract

A kinetic model for a discharge-pumped ArF excimer laser has been developed. The electrical circuit loss, collision loss of electrons and atoms in plasma, and photon absorption loss were calculated. The energy loss process from the electrical input to the laser output is discussed. It was found that 34% of the electrical input is lost in the electrical circuit, 30% of the deposited energy is lost as a elastic collision loss. Since there are large quenching losses and photo absorptions, the laser output energy is several percent of the input energy.

Paper Details

Date Published: 29 April 1999
PDF: 5 pages
Proc. SPIE 3729, Selected Papers from International Conference on Optics and Optoelectronics '98, (29 April 1999); doi: 10.1117/12.346793
Show Author Affiliations
Hideo Furuhashi, Aichi Institute of Technology (Japan)
Jun Yamada, Aichi Institute of Technology (Japan)
Yoshiyuki Uchida, Aichi Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 3729:
Selected Papers from International Conference on Optics and Optoelectronics '98
Kehar Singh; Om Prakash Nijhawan; Arun Kumar Gupta; A. K. Musla, Editor(s)

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