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Proceedings Paper

Hollow fiber delivery of ArF and KrF excimer laser light
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Paper Abstract

For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.

Paper Details

Date Published: 21 April 1999
PDF: 6 pages
Proc. SPIE 3596, Specialty Fiber Optics for Medical Applications, (21 April 1999); doi: 10.1117/12.346704
Show Author Affiliations
Yuji Matsuura, Tohoku Univ. (Japan)
Mitsunobu Miyagi, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 3596:
Specialty Fiber Optics for Medical Applications
Abraham Katzir; James A. Harrington, Editor(s)

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