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Proceedings Paper

Statistical approach to linewidth control in a logic fab
Author(s): Michael Pitter; Bernhard Doleschel; Ludwig Eibl; Erwin Steinkirchner; Andreas Grassmann
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Paper Abstract

We designed an adaptive line width controller specially tailored to the needs of a highly diversified logic fab. Simulations of different controller types fed with historic CD data show advantages of an SPC based controller over a Run by Run controller. This result confirms the SPC assumption that as long as a process is in statistical control, changing the process parameters will only increase the variability of the output.

Paper Details

Date Published: 23 April 1999
PDF: 5 pages
Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); doi: 10.1117/12.346252
Show Author Affiliations
Michael Pitter, Siemens AG (Germany)
Bernhard Doleschel, Siemens AG (Germany)
Ludwig Eibl, Siemens AG (Germany)
Erwin Steinkirchner, Siemens AG (Germany)
Andreas Grassmann, Siemens AG (Germany)


Published in SPIE Proceedings Vol. 3742:
Process and Equipment Control in Microelectronic Manufacturing
Kevin Yallup; Murali K. Narasimhan, Editor(s)

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