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Proceedings Paper

Optical integrated circuit for quality control
Author(s): Delphine Emzivat; Claude Gagnadre; Eric Martin
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Paper Abstract

Vision systems in quality control are increasingly widespread but are currently suffering from limitations in certain applications which concern as well their processing capability and their miniaturization. Today modern optics and electronics make it possible to consider integration of the sensors for acquisition and the processors for the image processing on a same circuit. The goal of this article is to present the broad outline of our sensor architecture and to formalize a motion detection method set up in a processor network optimized for a given algorithm.

Paper Details

Date Published: 23 April 1999
PDF: 9 pages
Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); doi: 10.1117/12.346239
Show Author Affiliations
Delphine Emzivat, Lester Lab. (France)
Claude Gagnadre, Lester Lab. (France)
Eric Martin, Lester Lab. (France)


Published in SPIE Proceedings Vol. 3742:
Process and Equipment Control in Microelectronic Manufacturing
Kevin Yallup; Murali K. Narasimhan, Editor(s)

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