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Proceedings Paper

Methodology to improve mean time between clean and decrease defectivity on LAM TCP 9600 by using self-excited electron plasma resonance spectroscopy
Author(s): Gerard Petit
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Paper Abstract

This paper investigates the use of plasma diagnostic monitoring to implement the right methodology to improve MTBC (Mean Time Between Clean) and decrease the defectivity on the LAM TCP9600. A global approach was used to reach our MTBC and defectivity goals by working on the main chamber wet clean procedures, on the conditioning procedures, on the pumping conditions and on the gas lines. The different partners involved were ST Microelectronics, LAM RESEARCH, ALCALEL, MILLIPORE and ASI.

Paper Details

Date Published: 23 April 1999
PDF: 8 pages
Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); doi: 10.1117/12.346236
Show Author Affiliations
Gerard Petit, ST Microelectronics (France)


Published in SPIE Proceedings Vol. 3742:
Process and Equipment Control in Microelectronic Manufacturing
Kevin Yallup; Murali K. Narasimhan, Editor(s)

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