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Proceedings Paper

Automated cost of ownership analysis for process development
Author(s): Vidar K. Nilsen; Anthony J. Walton
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Paper Abstract

This paper describes how costings analysis can be incorporated into a framework for process development. It describes how Cost of Ownership can be calculated from the information stored within existing process development tools through the use of CASTT (Cost Analysis in Total TCAD). It provides a method by which manufacturing costs can be forecast and alternative processing options can be compared. The existing elements of Total TCAD framework are described, an outline of the CASTT software is then given and examples are used to illustrate its potential.

Paper Details

Date Published: 23 April 1999
PDF: 9 pages
Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); doi: 10.1117/12.346235
Show Author Affiliations
Vidar K. Nilsen, Univ. of Edinburgh (United Kingdom)
Anthony J. Walton, Univ. of Edinburgh (United Kingdom)

Published in SPIE Proceedings Vol. 3742:
Process and Equipment Control in Microelectronic Manufacturing
Kevin Yallup; Murali K. Narasimhan, Editor(s)

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