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Proceedings Paper

Hierarchical mask data preparation and special fracturing techniques in MGS
Author(s): B. Buerger; Uwe Baetz; Klaus-Dietmar Kunze; H. Wolf
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Paper Abstract

MGS is a layout postprocessor software including a fracturing engine for Leica's ZBA e-beam writers. With the ZBA series including the new ZBA300 and its ability to write submicrometer masks for advanced technologies two main tasks have to be mastered in data preparation: (1) Processing of large and dense layouts. (2) Contribution to increased mask quality by optimized fracturing. These challenges are not restricted to the ZBA tools only; on the contrary they are of general interest for data preparation.

Paper Details

Date Published: 23 April 1999
PDF: 2 pages
Proc. SPIE 3665, 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98, (23 April 1999); doi: 10.1117/12.346217
Show Author Affiliations
B. Buerger, Fraunhofer Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Uwe Baetz, Fraunhofer Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Klaus-Dietmar Kunze, Fraunhofer Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
H. Wolf, Photronics MZD (Germany)


Published in SPIE Proceedings Vol. 3665:
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98
Uwe F. W. Behringer, Editor(s)

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