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Proceedings Paper

Densely packed surface-emitting laser arrays for printing applications
Author(s): Christopher L. Chua; Robert L. Thornton; David W. Treat; Rose M. Donaldson
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Paper Abstract

We report on our efforts to develop a laser printbar consisting of a very dense array of independently addressable laterally-oxidized top-emitting VCSELs. In order to maintain wafer planarity for easy electrical routing, the buried oxidation layer in our structure is accessed through small via holes instead of a more typical mesa etch. Unlike most VCSELs, our devices utilize transparent indium-tin- oxide top contacts that allow for a more compact device design. The 200-element array we fabricated has a linear density of one device every 3 micrometers .

Paper Details

Date Published: 14 April 1999
PDF: 7 pages
Proc. SPIE 3626, Testing, Packaging, Reliability, and Applications of Semiconductor Lasers IV, (14 April 1999); doi: 10.1117/12.345418
Show Author Affiliations
Christopher L. Chua, Xerox Palo Alto Research Ctr. (United States)
Robert L. Thornton, Xerox Palo Alto Research Ctr. (United States)
David W. Treat, Xerox Palo Alto Research Ctr. (United States)
Rose M. Donaldson, Xerox Palo Alto Research Ctr. (United States)


Published in SPIE Proceedings Vol. 3626:
Testing, Packaging, Reliability, and Applications of Semiconductor Lasers IV
Mahmoud Fallahi; S. C. Wang; Mahmoud Fallahi; Kurt J. Linden; S. C. Wang, Editor(s)

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