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Proceedings Paper

Pulsed laser deposition of TiN, AIN, and GaN films on sapphire
Author(s): V. Talyansky; R. D. Vispute; M. Stanton; M. Downes; S. Chupoon; Rajeshwar P. Sharma; T. Venkatesan; Y. X. Li; Lourdes Salamanca-Riba; M. C. Wood; Kenneth A. Jones
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Paper Abstract

In recent years, many novel materials of interest to the opto-electronics community have emerged. Extensive research of the newly introduced materials in the form of epitaxial thin films and heterostructures requires a rapid prototyping technique. The pulsed laser deposition (PLD) technique is well suited for such rapid and controlled growth of multilayers, demanding lesser parameter optimization effort than the conventional MBE and MOCVD processes. We have used the PLD technique to deposit epitaxial films of TiN, AIN, GaN films and heterostructures on sapphire substrates. The films were characterized by X-ray diffraction (XRD), Rutherford backscattering/channeling (RBS), transmission electron microscopy (TEM), electrical, and spectrophotometric measurements, which indicate a high degree of epitaxy and crystal quality.

Paper Details

Date Published: 2 January 1998
PDF: 5 pages
Proc. SPIE 3211, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96, (2 January 1998); doi: 10.1117/12.345376
Show Author Affiliations
V. Talyansky, University of Maryland (United States)
R. D. Vispute, University of Maryland (United States)
M. Stanton, University of Maryland (United States)
M. Downes, University of Maryland (United States)
S. Chupoon, University of Maryland (United States)
Rajeshwar P. Sharma, University of Maryland (United States)
T. Venkatesan, University of Maryland (United States)
Y. X. Li, University of Maryland (United States)
Lourdes Salamanca-Riba, University of Maryland (United States)
M. C. Wood, U.S. Army Research Lab (United States)
Kenneth A. Jones, U.S. Army Research Lab (United States)


Published in SPIE Proceedings Vol. 3211:
International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96
J. P. Raina; P. R. Vaya, Editor(s)

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